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Educational Background:
1972 Ph.D. University of California, Berkeley, California
1969 MSCE University of California, Berkeley, California
1968 BSCE Abadan Institute of Technology, Iran
Professional Experience:
1989-Present Professor
Department of Chemical and Environmental Engineering
Optical Sciences
Director, NSF/SRC Engineering Research Center on Environmentally Benign Semiconductor Mfg.
The University of Arizona, Tucson, Arizona, USA
1995-1996 Professor
Department of Chemical and Environmental Engineering
Co-Director of Sematech Center of Excellence on Contamination and Defect Control
The University of Arizona, Tucson, Arizona, USA
1979-1989 Assistant and Associate Professor
Department of Chemical Engineering
The University of Arizona, Tucson, Arizona, USA
1976-1979 Research Engineer
General Motors Research Laboratories
Detroit, Michigan, USA
1972-1976 Director
Environmental Research Center
University of Technology, Tehran, Iran
1972-1976 Assistant Professor
Chemical Engineering
University of Technology, Tehran, Iran
Honors and Awards:
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Akira Inoue Award, SEMI (December 2002)
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Fellow, AIChE (2002)
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Landmark Innovation Award, SRC (October 2000)
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Excellence in ESH-Related Research Award, SRC/Sematech/SIA (April 1998)
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Best Paper Award (with Eric Shero) Techcon (September 1997)
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Best Paper Award (with Mohith Verghese), Techcon (September 1998)
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Excellence in Research Award, Semiconductor Research Corp. and SEMATECH (June 1992)
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Invention Award, SRC/SEMATECH (March 1992)
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Best paper Award, Society of Electron Microscopy and Microbeam Analysis (1990)
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Best Paper of the Confrence Award; IEEE/CHMT, Washington, DC (1990)
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Cahn Research Award, Washington, DC (February 1989)
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Professor of the Year Award, College of Engineering and Mines, University of Arizona (1983)
Publications:
Please see publications page.
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